Elastic constant of dielectric nano-thin films using three-layer resonance studied by picosecond ultrasonics

Abstract Elastic constants and sound velocities of nm order thin films are essential for designing acoustic filters. However, it is difficult to measure them dielectric films. In this study, we use a three-layer structure where nano-thin film sandwiched between thicker metallic the longitudinal elastic constant film. We propose an efficiency function estimate optimal thicknesses components. Pt/NiO/Pt confirming our proposed method. The determined NiO deposited at room temperature smaller than bulk value by ?40%. approaches as deposition increases. also reveal that uncertainty Pt insignificantly affects accuracy in structure.